Manual operation type! Each dimension of the interface of various silicone devices can be measured with clear images.
The "IR1300mea" is an infrared transmission and reflection microscope system that can measure the dimensions of various silicon device interfaces with clear images, thanks to its high-resolution infrared CMOS camera and image enhancement software.
The focus axis has a long stroke, allowing for inspection and measurement of wafers while mounted on tall fixtures.
【Features】
- Equipped with linear scales on the X, Y, and Z axes for precise measurements outside the field of view.
- Manual operation type for the X, Y, and Z axes.
- Electric stage and electric focus can also be installed (optional).
- The focus axis can be set to a long stroke, enabling wafer inspection and measurement while mounted on fixtures (long stroke up to 45mm).
*For more details, please refer to the PDF document or feel free to contact us.